学会発表

国際会議発表論文(査読有)

国際会議発表論文(査読有)

    1. Comparison of novel reversed lift-off process with conventional lift-off process in cross-sectional shape on patterned structures, Shigetaka Watanabe, Junpei Sakurai, Mizue Mizoshiri, Seiichi Hata, Proceedings of 2015 ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment,MoB-1-1 (2015)
    2. Characteristics of Ti-Ni-Zr thin film metallic glasses for MEMS with three dimensional structure, Junpei Sakurai, Mizue Mizoshiri, Seiichi Hata, Proceedings of 2015 ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment,MoB-2-1 (2015)
    3. Reduction properties of nickel microstructures fabricated by direct femtosecond laser reduction patterning, Mizue Mizoshiri, Kenki Tamura, Junpei Sakurai, Seiichi Hata, Proceedings of 2015 ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment,MoB-2-2 (2015)
    4. Direct patterning of Cu microstructures using femtosecond laser-induced CuO nanoparticle reduction, Shun Arakane, Mizue Mizoshiri, Seiichi Hata, Japanese Journal of Applied Physics, 54 06FP07, (2015)
    5. Direct reduction and agglomeration of CuO nanoparticles for Cu micropatterning using femtosecond laser pulses Mizue Mizoshiri, Shun Arakane, Takuya Maetani, Mitsuhiro Shikida, Seiichi Hata, Proceedings of The 9th International Conference on MicroManufacturing, 121 (2014)
    6. The effect of metal buffer layers on open-circuit voltage of thin-film thermoelectric modules, Mizue Mizoshiri, Masashi Mikami, Kimihiro Ozaki, Mitsuhiro Shikida, Seiichi Hata, Proceedings of the JSME/ASME 2014 International Conference on Materials and Processing, 4983 (2014)
    7. New Fabrication Method of MEMS Thick Film Mirror Device of Cu-Zr-Ti Metallic Glass, Shigetaka Watanabe, Yutaka Nakamitsu, Junpei Sakurai, Seiichi Hata, Proceedings of the JSME/ASME 2014 International Conference on Materials and Processing, 4996 (2014)
    8. Direct Reduction of Copper Nanoparticles Using Femtosecond Laser Pulses for Copper Micropatterning, Shun Arakane, Mizue Mizoshiri, Takuya Maetani, Mitsuhiro Shikida, Seiichi Hata, Proceedings of the JSME/ASME 2014 International Conference on Materials and Processing, 5007 (2014)
    9. Combinatorial Search for Magnetostrictive Material With High Permeability and High Resistivity, Takuya Maetani, Yutaka Nakamitsu, Junpei Sakurai, Shigeki Nakagawa, Seiichi Hata, Proceedings of the JSME/ASME 2014 International Conference on Materials and Processing, 5028 (2014)
    10. Moisture-in-Oil Sensor Using New Thin Film Metal Filter, Takuya Maetani, Yusuke Yoshii, Yutaka Nakamitsu, Nobuyuki Mukai, Takashi Mizoguti, Tsutomu Takahashi, Yuuki Fukagawa, Mizue Mizoshiri, Seiichi Hata, Proceedings of the JSME/ASME 2014 International Conference on Materials and Processing, 5032 (2014)
    11. High Throughput Evaluation of Multi Cell Array for Searching Electrode Materials of Lithium-Ion Battery, Masashi Miyamoto, Kazuyoshi Honda, Yoshikazu Yamaoka, Kensuke Nakura, Mikinari Shimada, Eiji Ohno, Seiichi Hata, Proceedings of the JSME/ASME 2014 International Conference on Materials and Processing, 5037 (2014)
    12. Novel Combinatorial Method for Evaluation of Machinability for Glass Lens Mold Material, Shengxian Jiang, Junpei Sakurai, Yuko Aono and Seiichi Hata, 24th 2013 International Symposium on Micro-Nano Mechatronics and Human Science, CD-ROM, Nov.10-13 (2013, Nagoya, Japan)
    13. Integration of Combinatorial Evaluation and MEMS Technology for Material Search, Seiichi Hata, 23rd 2012 International Symposium on Micro-Nano Mechatronics and Human Science, CD-ROM, (2012.11.7. Nagoya)(招待講演)
    14. Corrosion Resistance Consolidation of a Diaphragm Type Vacuum Sensor, H. Kozako, J. Sakurai, N. Mukai, Y. Ohnuma, T. Takahashi, S. Hata, Technical Digest of The 24th IEEE International Conference on MEMS 2011, 400-403 (2011.1. 23-27 Cancun, Mexico)
    15. Seiichi Hata, Junpei Sakurai, Y. Aono, N. Tamujidi, Y. Matsumoto and A. Shimokohbe, Combinatorial Technology on Searching for Novel Amorphous Alloys, The 6th International Workshop on Combinatorial Materials Science and Technology (2010.10, Hokkaido, Japan)
    16. Yuko Aono, Junpei Sakurai, Tetsuo Ishida, Akira Shimokohbe and Seiichi Hata, Temperature gradient heating system for high-throughput method for determining time-temperature-transformation diagram using thin film samples, The 6th International Workshop on Combinatorial Materials Science and Technology (2010.10,Hokkaido, Japan)
    17. Junpei Sakurai, Yuko Aono, Yui Ishida and Seiichi Hata, Characteristics of Ti-Ni-Zr Thin Film Metallic Glasses Exhibiting a Shape Memory Effect after Crystallization, Technical Abstract of the 7th Pacific Rim International Conference on Advanced Materials and Processing, 78 (2010.8, Cairns, Australia)
    18. Yuko Aono, Junpei Sakurai, Akira Shimokohbe and Seiichi Hata, High-throughput Evaluation of Crystallization Temperature of Pd-Cu-Si System Using Integrated Thin Film Samples, Technical Abstract of the 7th Pacific Rim International Conference on Advanced Materials and Processing, 90 (2010.8, Cairns, Australia)
    19. Seiichi Hata, Junpei Sakurai, Hiroshi Kozako, Yukiko Matsumoto, Akira Shimokohbe, Nobuyuki Mukai, Yoshinori Ohnuma, Tsutomu Takahashi, Yasunori Saotome, Hisamichi Kimura, Parmanand Sharma and Akihisa Inoue, Development of high-performance vacuum sensor using joining method for thin film metallic glass, Proc. of ICCCI 2009 CD-ROM (2009.9.7, Kurashiki, Okayama, Japan)
    20. Yuko Aono, Seiichi Hata, Junpei Sakurai, Akira Shimokohbe, Novel Crystallization Temperature Measurement Method for Combinatorial Evaluation using Infrared Thermography, Proc. of 2009 MRS Spring Meeting, 1159E, G1-4. CD-ROM (2009.4, San Francisco, USA), (Oral)
    21. Sheng Wang, Dongming Sun, Seiichi Hata and Akira Shimokohbe, A cylindrical ultrasonic linear microactuator, Proceedings of 3rd JSME/ASME International Conference on Materials and Processing (ICM&P 2008), CD-ROM (2008 Oct. 7-10. Northwestern, Evanston, USA) (Oral)
    22. Seiichi Hata, Ryusuke Yamauchi, Taiyo Ueshima, Junpei Sakurai and Akira Shimokohbe, Search for Novel MEMS Materials using a Combinatorial Method, Proceedings of 3rd JSME/ASME International Conference on Materials and Processing (ICM&P 2008), CD-ROM (2008 Oct. 7-10. Northwestern, Evanston, USA) (Postor)
    23. Junpei Sakurai, Seiichi Hata, Mitsuhiro Abe, Yuko Aono and Akira Shimokohbe, Combinatorial evaluation of heat and oxidation resistances of Ni-Nb-Zr thin film amorphous alloys, Processings of 5th International Conference on Combinatorial and High-Throughput Materials Science. 1035 (2008, Sep. Germany), (Poster)
    24. Dongming Sun, Sheng Wang, Seiichi Hata, Junpei Sakurai and Akira Shimokohbe, Driving mechanism and experimental realization of a cylindrical ultrasonic linear microactuator, Book of abstracts in 34th International Conference on Micro & Nano Engineering (MNE 2008), 117 (2008. September 15-18, Athens, Greece), (Oral)
    25. Yuko Aono, Seiichi Hata, Junpei Sakurai and Akira Shimokohbe, New Measurement Method for Crystallization Temperature of Thin Film Amorphous Alloy, JUNIOR EUROMAT 2008, CD-ROM (2008. Jul.14-18, Lausanne, Switzerland), (Oral)
    26. Wang Sheng, Dongming Sun, Seiichi Hata and Akira Shimokohbe, A novel cylindrical ultrasonic linear microactuator, Proceedings of European Society for Precision Engineering and Nanotechnology (euspen Zurich 2008), 456-459 (2008.May 18-22.Zurich, Switzerland), (Poster)
    27. Masaaki Otsu, Yuki IDE, Junpei Sakurai, Seiichi Hata, Kazuki Takashima, Laser Forming of Pd-Based Thin Film Metallic Glass, Proc. 4th KU-KITECH Symposium on Bulk Metallic Glasses and Advanced Materials, 56, (2008.5, Kumamoto, Japan)
    28. J. Sakurai, S. Hata, R. Yamauchi, H. Tachikawa and A. Shimokohbe: Combinatorial Searching for Nobel Metal-based Amorphous Alloy Thin Films for Glass Lens Mold, Proc. of 2007 MRS Fall Meeting A1.6 CD-ROM (2007.11, Boston, MA, USA), (Oral)
    29. M. Abe, S. Hata, R. Yamauchi, J. Sakurai and A. Shimokohbe: Combinatorial Searching for Pt-Zr-Ni Thin Film Amorphous Alloys for Glass Lens Mold, Proc. of 2007 MRS Fall Meeting A6.14 CD-ROM (2007.11, Boston, MA, USA), (Poster)
    30. Y. Aono, S. Hata, J. Sakurai, R. Yamauchi, H. Tachikawa and A. Shimokohbe: Basic Research on Combinatorial Evaluation Method for Coefficient of Thermal Expansion, Proc. of 2007 MRS Fall Meeting A6.8 CD-ROM (2007.11, Boston, MA, USA), (Poster)
    31. Seiichi Hata, Ryusuke Yamauchi, Junpei Sakurai and Akira Shimokohbe: Behavior of joining interface between thin film metallic glass and silicon nitride at heating, Abstracts in1st International Conference on Science and Technology for Advanced Ceramics (STAC) and 2nd International Conference on Joining Technology for New Metallic Glasses and Inorganic Materials (JTMC), 56 (2007. 5. 23-25, Kanagawa), (Poster)
    32. R. Tanabe, S. Hata, A. Shimokohbe: A Disposable Concept Laminated MEMS Hematology Chip, Conference Proceedings of 7th International Conference of the European Society for Precision Engineering and Nanotechnology, 1, 45-48, (2007 Bremen, Germany),(Oral)
    33. Seiichi Hata, Ryusuke Yamauchi, Junpei Sakurai and Akira Shimokohbe: Cathodic Arc Plasma Combinatorial Material Synthesis for Composition Search of New Amorphous Alloy, Proc. of 2005 MRS Fall Meeting (2005.11, Boston, MA, USA) , (Poster)
    34. Junpei Sakurai, Seiichi Hata, Ryusuke Yamauchi and Akira Shimokohbe: Evaluation of Mo-based Amorphous Alloy Thin Films Exhibiting High Crystallization Temperature, Proc. of 2005 MRS Fall Meeting (2005.11, Boston, MA, USA),(Poster)
    35. Ryusuke Yamauchi, Seiichi Hata, Junpei Sakurai and Akira Shimokohbe: Combinatorial Optimization of Low Electrical Resistivity Pd-based Thin Film Metallic Glasses, Proc. of 2005 MRS Fall Meeting (2005.11, Boston, MA, USA) , (Oral)
    36. Seiichi Hata, Takashi Fukushige, Hiroyuki Tachikawa and Akira Shimokohbe: Out-of-plane Motion Microactuator Made of Thin Film Metallic Glass, Proc. of 18th International Congress of Mechanical Engineering (COBEM 2005), CD-ROM (2005.11, Ouro Preto, Brazil), (Oral)
    37. T. Fukushige, S. Hata and A. Shimokohbe: Integrated conical spring linear actuators for tilting-mirror applications, Abstracts of 31st International Conference on Micro- and Nano-Engineering (MNE2005), pp. 12-13 (2005.9 Vienna, Austria), (Oral)
    38. R. Tanabe, S. Hata and A. Shimokohbe: A complete blood count micro sensor designed to reduce noise from electrolysis gas, Abstracts of 31st International Conference on Micro- and Nano-Engineering 2005 (MNE2005), pp.622-623,(2005.9 Vienna, Austria), (Oral)
    39. T. Fukushige, S. Hata, Takehiko Hayashi, and A. Shimokohbe: Design and Driving Methodology of Out-of-Plane Electrostatic Microactuator with Extended Stable Motion Range, Proc. IPACK2005, CD-ROM, pp. IPACK2005-73145, (2005.6. San Francisco, USA), (Oral)
    40. Seiichi Hata, Junpei Sakurai and Akira Shimokohbe: Thin Film Metallic Glasses as New MEMS Materials, Technical Digest of The 18th IEEE International Conference on MEMS 2005, 479-482, (2005.1. Miami, USA), (Poster)
    41. J. Sakurai, S. Hata and A. Shimokohbe: Novel fabrication method of metallic glass thin film using carousel type sputtering system, Proc. of SPIE Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II, 260-267, (2004. 12. Sydney, Australia), (Oral)
    42. T. Fukushige, S. Hata and A. Shimokohbe: A New Driving Method for Electrostatic MEMS Actuators to Prevent Sticking, Proceedings of European Society for Precision Engineering and Nanotechnology (euspen Glasgow 2004), 15-16 (2004.6.Glasgow, Scotland), (Poster)
    43. S. Hata, H. W. JEONG and A. Shimokohbe: 2-DOF thin film metallic glass microactuator, Proceedings of European Society for Precision Engineering and Nanotechnology (euspen Glasgow 2004), 9-10 (2004.6.Glasgow, Scotland), (Oral)
    44. T. Fukushige, S. Hata and A. Shimokohbe: Large-output-force out-of-plane MEMS actuator array, Proceedings of SPIE International Symposium on Microelectronics, MEMS and Nanotechnology, vol. 5276, 240-248 (2003.12.Perth, Australia), (Oral)
    45. Seiichi Hata, Takashi Yamanaka, Jyunpei Sakurai and Akira Shimokohbe: Micro dome shape structures made of thin film metallic glass, Micro System Technology 2003 (MST ’03), 180-187 (2003. 10.7-8 Munich, Germany) , (Oral)
    46. J. Sakurai, S. Hata and A. Shimokohbe: Reduction of electrical resistivity in PdCuSi thin film metallic glass, Proceedings of International Conference on Advanced Technology in Experimental Mechanics 2003 (ATEM’03), CD-ROM (2003. 9.10-12 Nagoya, Japan) , (Oral)
    47. Seiichi Hata, The Application of Thin Film Metallic Glasses to 3D Micro Actuators, Proceedings of International Symposium on Smart Actuators and Sensors,1-8 (2003. 7.18 Tokyo, Japan) (Invited speaking)
    48. Seiichi Hata, Takashi Fukushige and Akira Shimokohbe, Displacement Characteristics of Microactuators Made of Thin Film Metallic Glass, Proceedings of CPT2002, 162-167 (2002.10. Daejeon, Korea), (Oral)
    49. Takashi Fukushige, Yoshisato Yokoyama, Seiichi Hata, Kazuya Masu and Akira Shimokohbe: Fabrication and Evaluation of On-Chip Micro Variable Inductor: Book of abstracts in Micro- and Nanoengineering International Conference (MNE 2002), 210-211 (2002.9. Lugano, Switzerland) , (Poster)
    50. Yoshisato YOKOYAMA, Takashi FUKUSHIGE, Seiichi HATA, Kazuya MASU and Akira SHIMOKOHBE: On-Chip Variable Inductor Using MEMS Technology; Extended Abstracts of the 2002 International Conference on Solid State Devices and Materials, 306-307 (2002.9. Nagoya, JAPAN), (Oral)
    51. Seiichi Hata, Tokokazu Kato, Takashi Fukushige and Akira Shimokohbe: Integrated Conical Soring Linear Actuator, Book of abstracts in Micro- and Nanoengineering International Conference (MNE 2002), 208-209 (2002.9. Lugano, Switzerland), (Poster)
    52. Hee-Won JEONG, Seiichi HATA and Akira SHIMOKOHBE: Micro-Forming of Thin Film Metallic Glass by Local Laser Heating; Technical Digest of The 15th IEEE International Conference on MEMS 2002, 372-375 (2002.1. Las Vegas, USA), (Poster)
    53. Seiichi HATA, Yutaka YAMADA, Junichi ICHIHARA and Akira SHIMOKOHBE: A Micro Lens Actuator for Optical Flying Head; Technical Digest of The 15th IEEE International Conference on MEMS 2002, 507-510 (2002.1. Las Vegas, USA), (Poster)
    54. S. HATA, Y. LIU, T. KATO and A. SHIMOKOHBE: Three-Dimensional Micro-Forming Process of Thin Film Metallic Glass in the Supercooled Liquid Region; Proceedings of 10th International Conference on Precision Engineering (ICPE), 37-41 (2001. 7. Yokohama, Japan), (Oral)
    55. Y. LIU, S. HATA, K. WADA and A. SHIMOKOHBE: Thin Film Metallic Glasses: Fabrication and Property Test; Technical Digest of The 14th IEEE International Conference on MEMS 2001, 102-105 (2001.1. Interlaken, Switzerland), (Poster)
    56. K. SATO, K. ITO, S. HATA and A. SHIMOKOHBE: Self-alignment of Microparts Using Liquid Surface Tension – Examination of the Alignment Characteristics -, Proceedings of ASPE’s 15th Annual Meeting, 345-348 (2000. Arizona, USA), (Oral)
    57. K. SATO, S. HATA and A. SHIMOKOHBE: Self-alignment for Microparts Assembly using Water Surface Tension; Proceedings of SPIE International Symposium on Microelectronics and Micro-Electro-Mechanical Systems MICRO/MEMS’99, 3892, 321-328 (1999.10.Queensland, Australia), (Oral)
    58. S. HATA, K. SATO and A. SHIMOKOHBE: Fabrication of Thin Film Metallic Glass and its Application to Microactuator; SPIE International Symposium on Microelectronics and Micro-Electro-Mechanical Systems MICRO/MEMS’99, 3892, 97-108 (1999.10.Queensland, Australia), (Oral)
    59. S. HATA, N. YAMADA, Y. SAOTOME, A. INOUE and A. SHIMOKOHBE: Precision and Micro Machining of Metallic Glasses -Formability of Zr Based Metallic Glasses in the Supercooled Liquid State-; Proceedings of China-Japan Bilateral Symposium on Advanced Manufacturing Engineering, 81-86 (1998.10. Yellow Mt., China), (Oral)
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